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VIISta PLAD T2

Overview

VIISTA PLAD T2 implanter and monitor processes 12” Wafers with its single wafer plasma doping system. The plasma implant voltage ranges from 200V to 10KV. It uses Ramped Wafer Bias that is programmed for optimum Dopant Profile Control and real-time magnetically suppressed Faraday closed loop dose control system.

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