The VIISta 810EHP is a single wafer ion implanter manufactured by Varian Semiconductor. It is designed to provide superior overall throughput, precision doping capability, and unmatched contamination control. The tool excels at various types of implants, including Vt, channel, retrograde well, pocket, and halo implants. This makes it a versatile and reliable choice for semiconductor manufacturing.

November 10, 2011 – Applied Materials, Inc. announced the successful completion of its acquisition of Varian Semiconductor Equipment Associates, Inc. 
Varian is the leading supplier of ion implantation equipment used by chip makers and has been applying this technology to crystalline silicon wafers for photovoltaic panels. Varian will operate as a business unit of Applied's Silicon Systems Group.

VIISta 810EHP

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