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MRL Phoenix 836-4
    Description
    - Software: GMI Host - Controller: MRL ICCI - Heating element type: MRL AZTEC HELIX 0440803538 R00 - Ovens 1,2,3 have Poly-Si tubes installed for processing wafers up to 5". Tube inner diameter = 180mm - Oven 4 has 6" Quarz tube. Inner diameter = 217mm - SiC paddles for all ovens - Machine is configured for N2, O2, H2 - Original torches are installed and functional - MFCs functional and calibrated for all gas lines - Original board is operational - 3 ovens have connected bubbler systems, integrated with N2 carrier flow - 4th oven has space for integrating another bubbler system - 12 original eurotherm to control all 4 ovens - Functional electro-preumatic control system with digital output
    Configuration
    No Configuration
    OEM Model Description
    None Provided
    Documents

    No documents

    MRL

    Phoenix 836-4

    verified-listing-icon

    Verified

    CATEGORY
    Furnaces / Diffusion

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    45591

    Wafer Sizes:

    Unknown

    Vintage:

    1995

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
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    MRL Phoenix 836-4

    MRL

    Phoenix 836-4

    Furnaces / Diffusion
    Vintage: 1995Condition: Used
    Last VerifiedOver 30 days ago

    MRL

    Phoenix 836-4

    verified-listing-icon
    Verified
    CATEGORY
    Furnaces / Diffusion
    Last Verified: Over 30 days ago
    listing-photo-c480fd74084048828122dae98e4c3d0b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2046/c480fd74084048828122dae98e4c3d0b/4aa0cbccb5e84ed6a338e37bb9519e9a_2896269a8b034b73b94903c8286bb90c1105c_mw.jpeg
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    45591

    Wafer Sizes:

    Unknown

    Vintage:

    1995

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    - Software: GMI Host - Controller: MRL ICCI - Heating element type: MRL AZTEC HELIX 0440803538 R00 - Ovens 1,2,3 have Poly-Si tubes installed for processing wafers up to 5". Tube inner diameter = 180mm - Oven 4 has 6" Quarz tube. Inner diameter = 217mm - SiC paddles for all ovens - Machine is configured for N2, O2, H2 - Original torches are installed and functional - MFCs functional and calibrated for all gas lines - Original board is operational - 3 ovens have connected bubbler systems, integrated with N2 carrier flow - 4th oven has space for integrating another bubbler system - 12 original eurotherm to control all 4 ovens - Functional electro-preumatic control system with digital output
    Configuration
    No Configuration
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    MRL Phoenix 836-4

    MRL

    Phoenix 836-4

    Furnaces / DiffusionVintage: 1995Condition: UsedLast Verified: Over 30 days ago