Description
exhaust 1 pump 4Configuration
Process Gas:CDA/P-N2/P-O2/SiH4/PH3OEM Model Description
DJ-802V for LPCVD. For LPCVD films, from 50 to 100 wafers are processed, depending on the film.Documents
No documents
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
130409
Wafer Sizes:
6"/150mm
Vintage:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KOKUSAI-ELECTRIC (KE)
DJ-802V
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
130409
Wafer Sizes:
6"/150mm
Vintage:
1992
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
exhaust 1 pump 4Configuration
Process Gas:CDA/P-N2/P-O2/SiH4/PH3OEM Model Description
DJ-802V for LPCVD. For LPCVD films, from 50 to 100 wafers are processed, depending on the film.Documents
No documents