KOKUSAI-ELECTRIC (KE)

Vertex-III(F)

"VERTRON-V(S2). Model Numbers: DD-835V/DJ-853V. As semiconductor devices becomes more highly integrated and miniaturized, it is necessary to control native oxide film growth on the wafer surface at the time of loading for applications such as formation of contact Poly-Si, capacitor nitride, ultra thin oxidation and selective oxidation, etc.
Hitachi Kokusai Electric recommends Load Lock vertical Diffusion/LPCVD Systems, Vertron-V, for these processes to utilize the unique oxygen free load lock chamber mounted directly underneath reactor tube."

DJ-853

"VERTEX-(S2).Model Numbers: DD-835V/DJ-835VAs semiconductor devices becomes more highly integrated and miniaturized, it is necessary to control native oxide film growth on the wafer surface at the time of loading for applications such as formation of contact Poly-Si, capacitor nitride, ultra thin oxidation and selective oxidation, etc.
Hitachi Kokusai Electric recommends Load Lock vertical Diffusion/LPCVD Systems, Vertron-V, for these processes to utilize the unique oxygen free load lock chamber mounted directly underneath reactor tube."

DJ 835

DJ-1810N-DLS

Kokusai: Vertex 5, loadlocked vertical tube LPCVD system.

VERTEX 5

DJ-802V-H

QUIXACE II CURE

DJ 1205V

VERTEX II

Zestone-III(C) DJ-1223V

ZESTONE- IIIC

DD1223V

QUIXACE NITRIDE

DD 1206VN-DM QUIXACE MINI

QUIXACE DJ-1206-VN

ZESTONE-V(B) DD-1205V

DJ 1206-VN HKE

ALDINNA DJ-1206VN-DM

QUIXACE II ALD HIGH-K

DD 1205V

DJ 1207S

QUIXACE DOPED POLY

DD1223VNP

ZESTONE NITR

QUIXACE ULTIMATE ALD TIN

DD 1236VN DF

DJ-813V

QUIXACE ULTIMATE

DD 823V-8PL

DD-1223 V-DF 

CX 9620

VERTRON Ⅲ DJ803

ZESTONE-V(B) DJ-1205V

DJ-807S-8C

QUIXACE II TEOS

ZESTONE-V(B) DJ-1205V-DF

DD 1206V DF

CX 5000

DJ 835-V-8L

"VERTRON-III(J3). Model Numbers: DD-853V/DJ-853V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DD 853

VERTRON 5S

VERTRON DJ-825V

QUIXACE ALDINNA

DD 853V-8BL2

DD 802V-B

ADVANCED ACE-300

VERTRON III

DD-1810N-DLS

DJ-825V-8BL

DJ803

DD 823V-8BL

DJ-823V-8BL

VERTRON Ⅲ DD803

DJ 815V-8L

QUIXACE ULTIMATE ALD SIO2

DD-802

DJ1206VN

DJ 1206-VN-DF

DJ1223VN-CX3	

QUIXACE DF

DD 802V H

QUIXACE II DOPED POLY

DD 803V

"VERTRON-III(F3) Model Numbers:DD-823V/DJ-823V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DD-823V

DJ-802V for LPCVD.
For LPCVD films, from 50 to 100 wafers are processed, depending on the film. 

DJ-802V

DD-812V

"VERTRON-III(G) Model Numbers:DD-833V/DJ-833V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 833V

QUIXACE II POLY

DJ 853V

QUIXACE II ALD NITRIDE 

DJ-1223VN	

DD-802V for diffusion.
The vertical reactor can accommodate 120 150mm wafers and up to 165 in the future.

DD-802V

QUIXACE II

DJ 1206V-DF

DD 853V

DJ 1223V

CX 3202

QUIXACE II NITRIDE

DJ 1236VN DF

"VERTRON-III(F3). Model Numbers: DD-823V/DJ-823V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 823V

DJ 853V 8BL

DJ-1223 VN-DF

CX 3000

DJ-813	

ZESTONE-III: DD-1223V

DJ-835V

QUIXACE ULTIMATE ALD SIN

DJ 802

DJ 803V

DD803

Vertical furnace, HTO (High Temperature Oxide)

DD 853V-8BL

"VERTRON-III(G) Model Numbers: DD-833V/DJ-833V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

KOKUSAI-ELECTRIC (KE)

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Top KOKUSAI-ELECTRIC (KE) Furnaces / Diffusion

DJ-853

DJ 835

DJ-1810N-DLS

DJ-823V-8BL

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All KOKUSAI-ELECTRIC (KE) Furnaces / Diffusion