KOKUSAI-ELECTRIC (KE)

DD 802V H

QUIXACE II DOPED POLY

DJ 853V 8BL

DJ-1223VN	

QUIXACE II

QUIXACE II POLY

DD-812V

DJ 1236VN DF

QUIXACE II NITRIDE

"VERTRON-III(F3) Model Numbers:DD-823V/DJ-823V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DD-823V

"VERTRON-III(J3). Model Numbers: DD-853V/DJ-853V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 853V

"VERTRON-III(G) Model Numbers:DD-833V/DJ-833V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 833V

QUIXACE ULTIMATE

DJ 1206V-DF

DD 803V

QUIXACE II ALD NITRIDE 

DJ 1223V

DD-802V for diffusion.
The vertical reactor can accommodate 120 150mm wafers and up to 165 in the future.

DD-802V

"VERTRON-III(F3). Model Numbers: DD-823V/DJ-823V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DJ 823V

DJ-802V for LPCVD.
For LPCVD films, from 50 to 100 wafers are processed, depending on the film. 

DJ-802V

DD1223V

QUIXACE ULTIMATE ALD SIN

DJ-1223 VN-DF

QUIXACE II ANNEAL

CX 3000

DJ-835V

CX 3202

QUIXACE II CURE

DD 853V

DD803

DD 1223VN

ZESTONE-III: DD-1223V

Vertical furnace, HTO (High Temperature Oxide)

DD 853V-8BL

VERTRON DD-803V

DJ-802V-H

DJ 802

CX 2000

DD 1205V

QUIXACE NITRIDE

"VERTRON-III(G) Model Numbers: DD-833V/DJ-833V. Hitachi Kokusai Electric's Vertron-III series Vertical Diffusion/LPCVD systems have been developed especially for 200mm wafers which are predominantly used in high-volume-semiconductor device manufacturing. The Vertron-III platform offers solid reliability and provides superior cost of ownership (Co0)to our customers.
 
The Vertron-III offers all conventional films as well as the unique processes of BTBAS Si3N4, and Selective SiGe epitaxy. Hitachi Kokusai is recognized as a leader in thermal solutions and customer satisfaction."

DD 833V

DJ-813V

DD 823V-8BL

DJ-813	

QUIXACE ULTIMATE ALD TIN

ADVANCED ACE-300

QUIXACE ULTIMATE ALD SIO2

DJ 815V-8L

DD-802

DD-1223 V-DF 

VERTRON III

DD 823V-8PL

DD 802V-B

ZESTONE-V(B) DJ-1205V

DD 1206V DF

QUIXACE DJ-1206-VN

Vertex-III(F)

DJ803

VERTRON Ⅲ DD803

DD 853V-8BL2

DD 853

DJ 1206-VN-DF

DD 1236VN DF

QUIXACE ALDINNA

QUIXACE II ALD HIGH-K

ZESTONE- IIIC

DJ-807S-8C

CX 5000

DJ1223VN-CX3	

ZESTONE-V(B) DJ-1205V-DF

DJ 1207S

DJ 835-V-8L

DJ1206VN

DD 1206VN-DM QUIXACE MINI

DJ 1205V

ZESTONE NITR

DJ 803V

VERTEX II

ZESTONE-V(B) DD-1205V

QUIXACE DOPED POLY

DJ-1810N-DLS

DD-1810N-DLS

"VERTRON-V(S2). Model Numbers: DD-835V/DJ-853V. As semiconductor devices becomes more highly integrated and miniaturized, it is necessary to control native oxide film growth on the wafer surface at the time of loading for applications such as formation of contact Poly-Si, capacitor nitride, ultra thin oxidation and selective oxidation, etc.
Hitachi Kokusai Electric recommends Load Lock vertical Diffusion/LPCVD Systems, Vertron-V, for these processes to utilize the unique oxygen free load lock chamber mounted directly underneath reactor tube."

DJ-853

VERTRON DJ-825V

Kokusai: Vertex 5, loadlocked vertical tube LPCVD system.

VERTEX 5

QUIXACE II TEOS

QUIXACE DF

ALDINNA DJ-1206VN-DM

CX 9620

VERTRON Ⅲ DJ803

VERTRON 5S

Zestone-III(C) DJ-1223V

DJ 1206-VN HKE

"VERTEX-(S2).Model Numbers: DD-835V/DJ-835VAs semiconductor devices becomes more highly integrated and miniaturized, it is necessary to control native oxide film growth on the wafer surface at the time of loading for applications such as formation of contact Poly-Si, capacitor nitride, ultra thin oxidation and selective oxidation, etc.
Hitachi Kokusai Electric recommends Load Lock vertical Diffusion/LPCVD Systems, Vertron-V, for these processes to utilize the unique oxygen free load lock chamber mounted directly underneath reactor tube."

DJ 835

DD1223VNP

KOKUSAI-ELECTRIC (KE)

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Top KOKUSAI-ELECTRIC (KE) Furnaces / Diffusion

DD 802V H

QUIXACE II DOPED POLY

DJ 853V 8BL

DJ-1223VN

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