KOKUSAI-ELECTRIC (KE)

DJ-1223VN	

DJ 1223VN.xlsx

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DJ-1223VN.xlsx

MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX3000
Equipment status: Out of Fab
Process: HTO
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX22250-011
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 480V
Single phase power: 1Ø AC 120V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / NH3 / SiH4 / N2O		
Others: ROBO 5000

DJ-1223VN.pdf

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MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX5000
Equipment status: Out of Fab
Process: Si3N4	
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX22250-009
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 440V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / NH3 / N2O			
Others: ROBO 5000

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MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX3000
Equipment status: Out of Fab
Process: Si3N4	
Type: Diffusion
Air valve: FUJIKIN
Heater: D4EX34044-002
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 440V
Single phase power: 1Ø AC 208V
Main/APC: CKD
Gas: PN2 / SiH2Cl2 / NH3 / F2		
Others: ROBO 5000

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6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

DJ-1223VN

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DJ-1223VN