An industrial vertical diffusion and chemical vapor deposition (CVD) furnace built for high-volume semiconductor manufacturing

KOKUSAI-ELECTRIC (KE)

DJ-853V-8BL3

System Layout -Main & Utility Integrated
System Type -L Type	
Side Maintenance - No Side Maintenance	
Furnace Front Surface Finish - Painted	
Rapid Cooling Unit	- Not Installed	
N2 Load Lock - Not Installed	
O2 Analyzer -Not Installed	
Cassette I/O Type (Normal / SMIF) -Normal I/O	
SMIF Maker / Model -Not Installed	
AGV Compatibility - Unable	
System Main Controller - CX3002B	
Mechanical Controller - CX1223	
Sequence Controller - OMRON CS1G	
Gas Controller - CX3202	
Gas Flow Chart Pannel - Not Installed	
Operation Pannel - Installed	
Signal Tower / Colors - Installed - 4 colors
Furnace Temperature Controller - CQ1600	
Furnace Overtemp Detector - DN-150V	
Gas Detecter Maker / Model - Not Installed	
Host Communications - Yes	
User Host Computer I/F- HSMS	
Manual (Drawing, Parts list etc) - Not Include	
Process Gas	N2 , NH3, DCS - Gas System
Integrated Gas System - Block style	
Manual Valve - FUJIKIN	
Air-Operated Valve - FUJIKIN	
Filter - MILLIPORE ( Ni )	
Regulator - VERIFLOW	
MFC Maker / Model - STEC / SEC-7330	
PT Sensor Maker / Model - NAGANO	
DPM Maker / Model - NAGANO	

Details Attached 
		

KE DJ-853V .pdf

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DJ-853V-8BL3

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KOKUSAI-ELECTRIC (KE)

DJ-853V-8BL3

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