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AVIZA / SVG / THERMCO 5200
    Description
    Furnace
    Configuration
    Diffusion/oxidation/alloy/annealing/LPVD
    OEM Model Description
    This four-chamber furnace is built to process semiconductor, nano, PV, LED, and MEMS substrates up to 150 mm in diameter. Constructed from steel, Thermco’s Model 5200 Diffusion Furnace is designed to withstand operating temperatures of 200-1250°C with a cool down rate of at least 3°C per minute. The furnace is controlled by a Thermco TMX controller and its system includes one MUX computer and one control computer per tube. Each chamber accommodates process tubes up to 10 inches (251 mm) in diameter. Compatible with Model 5000LS, D1, D2, and 5000SC.
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    AVIZA / SVG / THERMCO

    5200

    verified-listing-icon

    Verified

    CATEGORY
    Furnaces / Diffusion

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    63376

    Wafer Sizes:

    6"/150mm

    Vintage:

    Unknown

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    AVIZA / SVG / THERMCO 5200

    AVIZA / SVG / THERMCO

    5200

    Furnaces / Diffusion
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    AVIZA / SVG / THERMCO

    5200

    verified-listing-icon
    Verified
    CATEGORY
    Furnaces / Diffusion
    Last Verified: Over 60 days ago
    listing-photo-80fe952d62544735ae232f394a84b9ae-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    63376

    Wafer Sizes:

    6"/150mm

    Vintage:

    Unknown

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Furnace
    Configuration
    Diffusion/oxidation/alloy/annealing/LPVD
    OEM Model Description
    This four-chamber furnace is built to process semiconductor, nano, PV, LED, and MEMS substrates up to 150 mm in diameter. Constructed from steel, Thermco’s Model 5200 Diffusion Furnace is designed to withstand operating temperatures of 200-1250°C with a cool down rate of at least 3°C per minute. The furnace is controlled by a Thermco TMX controller and its system includes one MUX computer and one control computer per tube. Each chamber accommodates process tubes up to 10 inches (251 mm) in diameter. Compatible with Model 5000LS, D1, D2, and 5000SC.
    Documents

    No documents

    Similar Listings
    View All
    AVIZA / SVG / THERMCO 5200

    AVIZA / SVG / THERMCO

    5200

    Furnaces / DiffusionVintage: 0Condition: UsedLast Verified: Over 60 days ago