Description
No descriptionConfiguration
- Panels 1 & 3 need replacing - Heating element type: MRL AZTEC HELIX - Oven 1,2,3 have Si tubes installed - Tube size: inner diameter = 220mm - Oven 2 includes SiC paddle (ovens 1,3,4 do not) - Configured for N2, O2, H2 - All gas lines have functioning and calibrated Mikrolys MFCs - Upgraded Eaton SPX2200 - Original board is operational - All 4 ovens have connected bubbler systems, integrated with N2 carrier flow - 2 original ABB boards used for controlling all 4 ovens - Functioning electro-preumatic control system with digital output - 16 new isolation adaptors fit between heating element and tubeOEM Model Description
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AMTECH / TEMPRESS
TS61004 LH
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
45590
Wafer Sizes:
8"/200mm
Vintage:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllAMTECH / TEMPRESS
TS61004 LH
CATEGORY
Furnaces / Diffusion
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
45590
Wafer Sizes:
8"/200mm
Vintage:
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
- Panels 1 & 3 need replacing - Heating element type: MRL AZTEC HELIX - Oven 1,2,3 have Si tubes installed - Tube size: inner diameter = 220mm - Oven 2 includes SiC paddle (ovens 1,3,4 do not) - Configured for N2, O2, H2 - All gas lines have functioning and calibrated Mikrolys MFCs - Upgraded Eaton SPX2200 - Original board is operational - All 4 ovens have connected bubbler systems, integrated with N2 carrier flow - 2 original ABB boards used for controlling all 4 ovens - Functioning electro-preumatic control system with digital output - 16 new isolation adaptors fit between heating element and tubeOEM Model Description
None ProvidedDocuments
No documents