Description
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AERIS-G PLASMA ABATEMENT SYSTEM The Aeris-G system can be installed within the pump footprint of each chamber. Ideal for existing tool installations, it easily fits into existing exhaust lines and requires only power, nitrogen, cooling water and ultrapure water connections. For new tool installations, Aeris-G saves subfab space, reduces utility and exhaust connections, and minimizes installation costs while improving abatement efficiency.Documents
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APPLIED MATERIALS (AMAT)
AERIS-G
Verified
CATEGORY
Fab Support Equipment
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
59041
Wafer Sizes:
Unknown
Vintage:
Unknown
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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View AllAPPLIED MATERIALS (AMAT)
AERIS-G
Verified
CATEGORY
Fab Support Equipment
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
59041
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
AERIS-G PLASMA ABATEMENT SYSTEM The Aeris-G system can be installed within the pump footprint of each chamber. Ideal for existing tool installations, it easily fits into existing exhaust lines and requires only power, nitrogen, cooling water and ultrapure water connections. For new tool installations, Aeris-G saves subfab space, reduces utility and exhaust connections, and minimizes installation costs while improving abatement efficiency.Documents
No documents