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UNITY II-855II

Overview

This oxide etcher is configured for Wafer Size:8", Wafer type: flat-zone, Rack type: V1 rack, Processing type: vacuum, Wafer loading type: normal. The TEL Unity II series has a variety of configuraton optons including up to 3 process chambers, 16 process gases / chamber, and various endpoint detection systems. The TEL Unity II series has S2 safety compliance.

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