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TEL / TOKYO ELECTRON TELIUS
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:81931

    Wafer Sizes:12"/300mm

    Vintage:2007

    Description

    DRM Chamber 2

    Configuration

    TEL Telius 3055DD

    Documents
    No documents
    OEM Model Description

    Telius (300mm) etch systems. Successor to the Unity, generally 4 chamber, but could support purge modules and other HW.

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