Description
No descriptionConfiguration
1 EFEM 3 PMS 2 AC Rack 3 Generator Rack, etcOEM Model Description
Telius (300mm) etch systems. Successor to the Unity, generally 4 chamber, but could support purge modules and other HW.Documents
No documents
TEL / TOKYO ELECTRON
TELIUS
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
52917
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
52917
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
1 EFEM 3 PMS 2 AC Rack 3 Generator Rack, etcOEM Model Description
Telius (300mm) etch systems. Successor to the Unity, generally 4 chamber, but could support purge modules and other HW.Documents
No documents