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TEL / TOKYO ELECTRON TELIUS SP 305 SCCM TE
    Description
    Dielectric Etch (Contact)
    Configuration
    -Software Version: 5.65 -CIM: Yes -Main System: Main mini environment Platform (1) ok[√ ] -SMIF System: Shinko (4) ok[√ ] -Handler System: Shinko (1) ok[√ ] Orient (1) ok[√ ] -Process chamber 1: Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Process chamber 2 Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Load lock module LLM CM VAC Valve (1) ok[√ ] ARM DRIVE (1) ok[√ ] ARM Fork (1) ok[√ ] Gauge (1) ok[√ ] -End point detection SE2000 (1) ok[√ ] -Gas panel for PM1/PM2 H2 (1) (MFC Lack) CH2F2 (1) ok[√ ] CH3F (1) (MFC Lack) CF4 (1) ok[√ ] O2 (1) ok[√ ] O2 (1) ok[√ ] C4F6 (1) ok[√ ] C4F8(1) ok[√ ] CHF3 (1) ok[√ ] CO (1) ok[√ ] Ar (1) ok[√ ] N2 (1) (MFC Lack) -Power rack: set ok[√ ]
    OEM Model Description
    None Provided
    Documents

    No documents

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM TE

    verified-listing-icon

    Verified

    CATEGORY

    Plasma Etch
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    52302

    Wafer Sizes:

    12"/300mm

    Vintage:

    2007

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
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    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM TE
    TEL / TOKYO ELECTRONTELIUS SP 305 SCCM TEPlasma Etch
    Vintage: 2007Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM TE

    verified-listing-icon

    Verified

    CATEGORY

    Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-40b2808e02854eddb066f7b973e0dd2a-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1458/40b2808e02854eddb066f7b973e0dd2a/3d33a92d38b942348c018ccffbf7366f_43882ae49f4b4bcca57f1c1918c9de0445005c_mw.jpeg
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    52302

    Wafer Sizes:

    12"/300mm

    Vintage:

    2007

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Dielectric Etch (Contact)
    Configuration
    -Software Version: 5.65 -CIM: Yes -Main System: Main mini environment Platform (1) ok[√ ] -SMIF System: Shinko (4) ok[√ ] -Handler System: Shinko (1) ok[√ ] Orient (1) ok[√ ] -Process chamber 1: Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Process chamber 2 Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Load lock module LLM CM VAC Valve (1) ok[√ ] ARM DRIVE (1) ok[√ ] ARM Fork (1) ok[√ ] Gauge (1) ok[√ ] -End point detection SE2000 (1) ok[√ ] -Gas panel for PM1/PM2 H2 (1) (MFC Lack) CH2F2 (1) ok[√ ] CH3F (1) (MFC Lack) CF4 (1) ok[√ ] O2 (1) ok[√ ] O2 (1) ok[√ ] C4F6 (1) ok[√ ] C4F8(1) ok[√ ] CHF3 (1) ok[√ ] CO (1) ok[√ ] Ar (1) ok[√ ] N2 (1) (MFC Lack) -Power rack: set ok[√ ]
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM TE
    TEL / TOKYO ELECTRON
    TELIUS SP 305 SCCM TE
    Plasma EtchVintage: 2007Condition: UsedLast Verified: Over 60 days ago