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TACTRAS

Overview

Tactras™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. Tactras™ provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. Successor to the Telius, generally configured for 6 chambers.

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