TEL / TOKYO ELECTRON
TACTRAS
Etchers & Ashers
Vintage: Unknown
Condition: As-Is
Last Verified
5 days ago
Tactras™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. Tactras™ provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. Successor to the Telius, generally configured for 6 chambers.
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Etchers & Ashers
Etchers & Ashers
Etchers & Ashers
Etchers & Ashers