Used APPLIED MATERIALS (AMAT) CENTURA METAL DPS Equipment

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CENTURA METAL DPS

Overview

Two new etch systems were launched in 1996 for HDP etching of metal and silicon films, using AMAT's DPS (Decoupled Plasma Source) technology. The DPS Metal Etch Centura and DPS Silicon Etch Centura are aimed at very advanced applications, primarily for deep submicron devices (0.25-micron).

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APPLIED MATERIALS (AMAT)CENTURA METAL DPSPlasma Etch
Vintage: Condition: Used
Last Verified23 days ago
APPLIED MATERIALS (AMAT)CENTURA METAL DPSPlasma Etch
Vintage: Condition: Used
Last Verified23 days ago
APPLIED MATERIALS (AMAT)CENTURA METAL DPSPlasma Etch
Vintage: Condition: Used
Last Verified23 days ago
APPLIED MATERIALS (AMAT)CENTURA METAL DPSPlasma Etch
Vintage: Condition: Used
Last Verified23 days ago

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