APPLIED MATERIALS (AMAT) CENTURA METAL DPS

Description

No description

Configuration

Centura I DPS METEL Rev.0 2-ETCH / 2-ASP 6 inch

OEM Model Description

Two new etch systems were launched in 1996 for HDP etching of metal and silicon films, using AMAT's DPS (Decoupled Plasma Source) technology. The DPS Metal Etch Centura and DPS Silicon Etch Centura are aimed at very advanced applications, primarily for deep submicron devices (0.25-micron).