Description
Operational as-isConfiguration
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEM Model Description
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PLASMATHERM
SLR 720
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
36140
Wafer Sizes:
4"/100mm, 8"/200mm
Vintage:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM
SLR 720
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
36140
Wafer Sizes:
4"/100mm, 8"/200mm
Vintage:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Operational as-isConfiguration
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEM Model Description
None ProvidedDocuments
No documents