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LAM RESEARCH CORPORATION TCP 9400SE
    Description
    No description
    Configuration
    -Condition: installed -8 inch, Poly -no missing parts -envision software -Electrostatic chucks -have end points
    OEM Model Description
    The TCP 9400SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400SE is used for polysilicon and polycide etch applications. It operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates with independent power control to the lower electrode, which improves etch results across a wider process window. Lam’s TCP systems are designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The TCP systems are available as stand-alone, single wafer tools, or on the Alliance multichamber cluster platform.
    Documents

    No documents

    LAM RESEARCH CORPORATION

    TCP 9400SE

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    83858


    Wafer Sizes:

    8"/200mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    LAM RESEARCH CORPORATION TCP 9400SE

    LAM RESEARCH CORPORATION

    TCP 9400SE

    Dry / Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    LAM RESEARCH CORPORATION

    TCP 9400SE

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    83858


    Wafer Sizes:

    8"/200mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    -Condition: installed -8 inch, Poly -no missing parts -envision software -Electrostatic chucks -have end points
    OEM Model Description
    The TCP 9400SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400SE is used for polysilicon and polycide etch applications. It operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates with independent power control to the lower electrode, which improves etch results across a wider process window. Lam’s TCP systems are designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The TCP systems are available as stand-alone, single wafer tools, or on the Alliance multichamber cluster platform.
    Documents

    No documents

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    LAM RESEARCH CORPORATION TCP 9400SE

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    TCP 9400SE

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago
    LAM RESEARCH CORPORATION TCP 9400SE

    LAM RESEARCH CORPORATION

    TCP 9400SE

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago
    LAM RESEARCH CORPORATION TCP 9400SE

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    TCP 9400SE

    Dry / Plasma EtchVintage: 1993Condition: UsedLast Verified:Over 60 days ago