2300 EXELAN
Category
Etch/AsherOverview
The 2300 Exelan is a dielectric etch system introduced in November 2000, designed to process both 200mm and 300mm wafers. It combines Dual Frequency Confined™ (DFC™) plasma technology with state-of-the-art chamber design to provide advanced process performance for copper conductive lines creation, latest generation insulating films, and high aspect ratio applications. It features the industry’s largest dielectric etch portfolio and is capable of meeting the challenges of new materials and reduced geometries at the 130nm technology node and below.
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- 2300 EXELANEtch/AsherVintage: Condition: UsedLast Verified18 days ago
- 2300 EXELANEtch/AsherVintage: Condition: UsedLast Verified26 days ago
- 2300 EXELANEtch/AsherVintage: 2004Condition: RefurbishedLast VerifiedOver 60 days ago
- 2300 EXELANEtch/AsherVintage: 2004Condition: RefurbishedLast VerifiedOver 60 days ago