TCP 9600SE
Category
Etch/AsherOverview
The TCP 9600SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. It is used for metal etch applications and is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates. It is available as a stand-alone, single wafer tool, or on the Alliance multichamber cluster platform.
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LAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast Verified19 days agoLAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: RefurbishedLast VerifiedOver 30 days agoLAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast VerifiedOver 60 days ago
LAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
TCP 9600SE
Etch/AsherVintage: Condition: UsedLast VerifiedOver 60 days ago