Description
Wafer Edge Cleaning - PlasmaConfiguration
No ConfigurationOEM Model Description
The 2300 Coronus is a plasma-based bevel clean system developed by Lam Research. It removes yield-limiting defect sources from the wafer edge, maximizing yield. The system combines plasma cleaning with proprietary confinement technology to protect the die area. It is flexible and robust, allowing for removal of different materials within the same chamber for a wide range of wafer cleaning applications. The Coronus system incorporates Lam Research’s Dynamic Alignment technology for highly accurate wafer placement and encroachment control.Documents
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LAM RESEARCH CORPORATION
2300 CORONUS
Verified
CATEGORY
Etch/Asher
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
91746
Wafer Sizes:
Unknown
Vintage:
Unknown
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LAM RESEARCH CORPORATION2300 CORONUSEtch/Asher
Vintage: 0Condition: Used
Last VerifiedOver 30 days ago
LAM RESEARCH CORPORATION2300 CORONUSEtch/Asher
Vintage: 0Condition: Used
Last VerifiedOver 30 days ago
LAM RESEARCH CORPORATION
2300 CORONUS
Verified
CATEGORY
Etch/Asher
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
91746
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Wafer Edge Cleaning - PlasmaConfiguration
No ConfigurationOEM Model Description
The 2300 Coronus is a plasma-based bevel clean system developed by Lam Research. It removes yield-limiting defect sources from the wafer edge, maximizing yield. The system combines plasma cleaning with proprietary confinement technology to protect the die area. It is flexible and robust, allowing for removal of different materials within the same chamber for a wide range of wafer cleaning applications. The Coronus system incorporates Lam Research’s Dynamic Alignment technology for highly accurate wafer placement and encroachment control.Documents
No documents
Similar Listings
View AllLAM RESEARCH CORPORATION
2300 CORONUS
Etch/AsherVintage: 0Condition: UsedLast Verified: Over 30 days agoLAM RESEARCH CORPORATION
2300 CORONUS
Etch/AsherVintage: 0Condition: UsedLast Verified: Over 30 days agoLAM RESEARCH CORPORATION