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LAM RESEARCH / NOVELLUS / GASONICS GAMMA 2100
    Description
    ASHER
    Configuration
    ASHER
    OEM Model Description
    The GAMMA 2100 200mm photoresist removal system uses a plasma source to strip photoresist. The GAMMA architecture features a multi-station sequential processing design with six strip stations, resulting in high wafer throughput with a minimal number of critical subsystems.
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    LAM RESEARCH / NOVELLUS / GASONICS

    GAMMA 2100

    verified-listing-icon

    Verified

    CATEGORY
    Etch/Asher

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    48869

    Wafer Sizes:

    8"/200mm

    Vintage:

    2002

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    LAM RESEARCH / NOVELLUS / GASONICS GAMMA 2100

    LAM RESEARCH / NOVELLUS / GASONICS

    GAMMA 2100

    Etch/Asher
    Vintage: 2002Condition: Used
    Last VerifiedOver 60 days ago
    LAM RESEARCH / NOVELLUS / GASONICS GAMMA 2100

    LAM RESEARCH / NOVELLUS / GASONICS

    GAMMA 2100

    Etch/Asher
    Vintage: 0Condition: Used
    Last Verified9 days ago
    LAM RESEARCH / NOVELLUS / GASONICS GAMMA 2100

    LAM RESEARCH / NOVELLUS / GASONICS

    GAMMA 2100

    Etch/Asher
    Vintage: 2002Condition: Used
    Last Verified12 days ago
    LAM RESEARCH / NOVELLUS / GASONICS GAMMA 2100

    LAM RESEARCH / NOVELLUS / GASONICS

    GAMMA 2100

    Etch/Asher
    Vintage: 0Condition: Used
    Last VerifiedOver 30 days ago

    LAM RESEARCH / NOVELLUS / GASONICS

    GAMMA 2100

    verified-listing-icon
    Verified
    CATEGORY
    Etch/Asher
    Last Verified: Over 60 days ago
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    48869

    Wafer Sizes:

    8"/200mm

    Vintage:

    2002

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    Description
    ASHER
    Configuration
    ASHER
    OEM Model Description
    The GAMMA 2100 200mm photoresist removal system uses a plasma source to strip photoresist. The GAMMA architecture features a multi-station sequential processing design with six strip stations, resulting in high wafer throughput with a minimal number of critical subsystems.
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