Description
MBE MOD System Three Inch wafer, 8 sources. Indium-free 10 sample holders with different profiles. Substrate heater up to 1000 C. Substrate manipulator: power supply, temperature controller, and servo motor control unit. Clean chamber and can be used for any materials. All sources are on 4.5” flanges. Effusion cells can be configured as required. Two valved crackers (as required). RF plasma source for either nitrogen or oxygen. Growth chamber pumps: 400 l/m ion pump and 10” cryo pump. Prep chamber pumps: 220 l/m ion pump. Load lock pumps: Sorption, mechanical, and turbo pumps. Three ion gauges and controllers. RHEED and QMS systems. Pyrometer. New software and PC. Bake out panels.Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 9 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
144927
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
VEECO / APPLIED EPI / VARIAN
GEN II
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 9 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
144927
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
MBE MOD System Three Inch wafer, 8 sources. Indium-free 10 sample holders with different profiles. Substrate heater up to 1000 C. Substrate manipulator: power supply, temperature controller, and servo motor control unit. Clean chamber and can be used for any materials. All sources are on 4.5” flanges. Effusion cells can be configured as required. Two valved crackers (as required). RF plasma source for either nitrogen or oxygen. Growth chamber pumps: 400 l/m ion pump and 10” cryo pump. Prep chamber pumps: 220 l/m ion pump. Load lock pumps: Sorption, mechanical, and turbo pumps. Three ion gauges and controllers. RHEED and QMS systems. Pyrometer. New software and PC. Bake out panels.Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents