Description
VEECO Gen II MBE Growth system, 3"Configuration
(10) ports for dopants Process: Growth of arsenides and phosphides Liquid nitrogen Phase separator AlGaAs Laser Room temperature: 6°C - 10°C Vacuum: Growth chamber (GC) Triode ion pump: 400 l/sec Buffer chamber (BC) Triode ion pump: 200 l/sec (2) TSP Controllers Loadlock chamber (LC) (100) CTI Cryotor cryopumps (2) Vacshorption pumps Ventury pump In situ and calibration tools: RHEED System: 0-10 keV RHEED Oscillation growth rate calibration system Cells: EPI Valved cracker with valved controller Cable Riber three zone P Valved cracker with valve controller Power supply (4) 400g Sumo cells Ga, In, Al (2) Dopont cells Dual electronic equipment rack, 19" (12) Solenson DC power supplies Riber P valved cracker 2704 Dual channel Eurotherm controller Substrate and heated station (2) DC Power supplies Substrate heater Heated stationOEM Model Description
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CATEGORY
Epitaxial deposition (EPI)
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
145622
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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VEECO / APPLIED EPI / VARIAN
GEN II
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
145622
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
VEECO Gen II MBE Growth system, 3"Configuration
(10) ports for dopants Process: Growth of arsenides and phosphides Liquid nitrogen Phase separator AlGaAs Laser Room temperature: 6°C - 10°C Vacuum: Growth chamber (GC) Triode ion pump: 400 l/sec Buffer chamber (BC) Triode ion pump: 200 l/sec (2) TSP Controllers Loadlock chamber (LC) (100) CTI Cryotor cryopumps (2) Vacshorption pumps Ventury pump In situ and calibration tools: RHEED System: 0-10 keV RHEED Oscillation growth rate calibration system Cells: EPI Valved cracker with valved controller Cable Riber three zone P Valved cracker with valve controller Power supply (4) 400g Sumo cells Ga, In, Al (2) Dopont cells Dual electronic equipment rack, 19" (12) Solenson DC power supplies Riber P valved cracker 2704 Dual channel Eurotherm controller Substrate and heated station (2) DC Power supplies Substrate heater Heated stationOEM Model Description
None ProvidedDocuments
No documents