Description
NuFlare EGV-30GX 6"Susceptor(Covalent Material)φ740mm The Susceptor serves functions such as wafer positioning, uniform heat conduction, and improving the flow field of reactive gases with rotation.Configuration
Size: - Ø740 mm - Ø150 mm Thickness: - 14.4mm Weight: - 10KGOEM Model Description
Epitaxial reactor (CVD/epitaxial growth system) used in semiconductor manufacturingDocuments
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NUFLARE
EGV-30GX
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 13 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
152531
Wafer Sizes:
6"/150mm
Vintage:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
NuFlare EGV-30GX 6"Susceptor(Covalent Material)φ740mm The Susceptor serves functions such as wafer positioning, uniform heat conduction, and improving the flow field of reactive gases with rotation.Configuration
Size: - Ø740 mm - Ø150 mm Thickness: - 14.4mm Weight: - 10KGOEM Model Description
Epitaxial reactor (CVD/epitaxial growth system) used in semiconductor manufacturingDocuments
No documents