Description
300MM ASME 3000 EPI HEXConfiguration
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM Model Description
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ASM
EPSILON E3000
Verified
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112988
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllASM
EPSILON E3000
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112988
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
300MM ASME 3000 EPI HEXConfiguration
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM Model Description
None ProvidedDocuments
No documents