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Description
300MM ASME 3000 EPI HEXConfiguration
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112988
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASM
EPSILON E3000
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112988
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
300MM ASME 3000 EPI HEXConfiguration
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM Model Description
None ProvidedDocuments
No documents