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ASM EPSILON E3000
  • ASM EPSILON E3000
  • ASM EPSILON E3000
  • ASM EPSILON E3000
Description
300MM ASME 3000 EPI HEX
Configuration
Software Version: Standard CIM: SECS GEM Process: EPI Main System: Main Tool OK Handler System: Standard 1 OK Factory Interface: FOUP 4 OK Others: Upgrades 2006-2011Mass Flow Verifcation Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ASM EPI Backpressue U/G 4 OK
OEM Model Description
None Provided
Documents

No documents

CATEGORY
Epitaxial deposition (EPI)

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

106597


Wafer Sizes:

12"/300mm


Vintage:

2003


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

ASM

EPSILON E3000

verified-listing-icon
Verified
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 30 days ago
listing-photo-c2fda05a518242d580ce61ef622b5dfe-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

106597


Wafer Sizes:

12"/300mm


Vintage:

2003


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
300MM ASME 3000 EPI HEX
Configuration
Software Version: Standard CIM: SECS GEM Process: EPI Main System: Main Tool OK Handler System: Standard 1 OK Factory Interface: FOUP 4 OK Others: Upgrades 2006-2011Mass Flow Verifcation Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ASM EPI Backpressue U/G 4 OK
OEM Model Description
None Provided
Documents

No documents