Description
300MM ASME 3000 EPI HEXConfiguration
Software Version: Standard CIM: SECS GEM Process: EPI Main System: Main Tool OK Handler System: Standard 1 OK Factory Interface: FOUP 4 OK Others: Upgrades 2006-2011Mass Flow Verifcation Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ASM EPI Backpressue U/G 4 OKOEM Model Description
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ASM
EPSILON E3000
Verified
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106597
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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View AllASM
EPSILON E3000
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106597
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
300MM ASME 3000 EPI HEXConfiguration
Software Version: Standard CIM: SECS GEM Process: EPI Main System: Main Tool OK Handler System: Standard 1 OK Factory Interface: FOUP 4 OK Others: Upgrades 2006-2011Mass Flow Verifcation Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ASM EPI Backpressue U/G 4 OKOEM Model Description
None ProvidedDocuments
No documents