Description
Dry etch systemConfiguration
Known issues: Not included: Pumps; Chillers; Abatement Centura Mainframe (Qty 2) SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot (Qty 2) Batch Loadlocks (Qty 2) FOUP Factory Interface FI Robot Controller (Qty 2) Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate (Qty 2) Cooldown Station Assy Loadlock Cover (Qty 2) Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply (Qty 2) Siconi Lid Heater Driver Siconi Electrode (Qty 2) Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Process: SiCoNi CIM: SECS/GEMOEM Model Description
None ProvidedDocuments
No documents
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154777
Wafer Sizes:
12"/300mm
Vintage:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA ACP
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154777
Wafer Sizes:
12"/300mm
Vintage:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Dry etch systemConfiguration
Known issues: Not included: Pumps; Chillers; Abatement Centura Mainframe (Qty 2) SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot (Qty 2) Batch Loadlocks (Qty 2) FOUP Factory Interface FI Robot Controller (Qty 2) Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate (Qty 2) Cooldown Station Assy Loadlock Cover (Qty 2) Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply (Qty 2) Siconi Lid Heater Driver Siconi Electrode (Qty 2) Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Process: SiCoNi CIM: SECS/GEMOEM Model Description
None ProvidedDocuments
No documents