Description
DESCRIPTION Qty MODEL REMARK LOADPORT 4 SELOP12F25-30U-13 SHINKO LOADMODULE 3 SELME2112ZS2-EG1 SHINKO EFEM ROBOT 1 SBX921012686-3 SHINKO EFEM ROBOT CONTROLLER 1 LM-ARM-CONT2 SHINKO PROCESS MODULE 3 SCCM TE LOAD LOCK MODULE 3 SCCM TE LOAD LOCK ROBOT 3 2L80-000155-11 Nabtesco POWER RACK 3 SCCM TE RF GENERATOR 1 AGA-50B (60Mhz / 5kw) DAIHEN RF GENERATOR 3 WGA-50E (2Mhz / 5kw) DAIHEN AC POWER BOX 3 TSP-3055SSS TMP 1 TMP-3403 SHIMADZU GAS BOX 3 SCCM TE MFC 1 1 C5F8_50 UFC-8261 MFC 2 1 C4F8_50 UFC-8261 MFC 3 1 C4F6_100 UFC-8261 MFC 4 0 MFC 5 1 Ar_2SLM UFC-8261 MFC 6 1 02_1SLM UFC-8261 MFC 7 1 02_50 UFC-8261 MFC 8 1 CF4_50 UFC-8261 MFC 9 1 CH2F2_100 UFC-8261 MFC 10 1 CF4_250 FC-8261 MFC 11 1 CHF3_200 UFC-8261 MFC 12 1 N2_500 UFC-8261Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
138698
Wafer Sizes:
12"/300mm
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
SCCM TE
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
138698
Wafer Sizes:
12"/300mm
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available