Description
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Tegal Plasma 915 it comes with two Trivac D40BCS pumps and an extra RF Generator (for the Tegal).OEM Model Description
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TEGAL
915
CATEGORY
Dry / Plasma Etch
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
109618
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Tegal Plasma 915 it comes with two Trivac D40BCS pumps and an extra RF Generator (for the Tegal).OEM Model Description
None ProvidedDocuments
No documents