Description
Etch / ashing systemConfiguration
Open wafer cassette loading Photoresist stripping / ashingOEM Model Description
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TEGAL
915
CATEGORY
Dry / Plasma Etch
Last Verified: 16 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155975
Wafer Sizes:
6"/150mm
Vintage:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Etch / ashing systemConfiguration
Open wafer cassette loading Photoresist stripping / ashingOEM Model Description
None ProvidedDocuments
No documents