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STS VPX PEGASUS

Description

ICP DRIE System, Includes: 1ea control cabinet w/ PDU, ENI RF generator, MKS Spectrum RF generator; 1ea SMC HRZ001-L-D recirculating chiller; 1ea Ebara SR20N vacuum pump; 1ea Ebara ESR20N-HT vacuum pump; 1ea Ebara vacuum pump

Configuration

No Configuration

OEM Model Description

None Provided

Documents

No documents

STS

VPX PEGASUS

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: 11 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

149257

Wafer Sizes:

6"/150mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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Last Verified: 11 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

149257

Wafer Sizes:

6"/150mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

ICP DRIE System, Includes: 1ea control cabinet w/ PDU, ENI RF generator, MKS Spectrum RF generator; 1ea SMC HRZ001-L-D recirculating chiller; 1ea Ebara SR20N vacuum pump; 1ea Ebara ESR20N-HT vacuum pump; 1ea Ebara vacuum pump

Configuration

No Configuration

OEM Model Description

None Provided

Documents

No documents

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STS VPX PEGASUS

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Dry / Plasma EtchVintage: 2009Condition: UsedLast Verified:Over 60 days ago