STS provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. 

VPX PEGASUS

ICP DRIE System, Includes: 1ea control cabinet w/ PDU, ENI RF generator, MKS Spectrum RF generator; 1ea SMC HRZ001-L-D recirculating chiller; 1ea Ebara SR20N vacuum pump; 1ea Ebara ESR20N-HT vacuum pump; 1ea Ebara vacuum pump

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Horizontal furnaces, GIGA TECH cleaning machines, and BAKE are excluded.

VPX PEGASUS

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STS

VPX PEGASUS

STS

VPX PEGASUS

STS

VPX PEGASUS

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