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STS PRO ICP

Description

ICP Etcher Complete

Configuration

Was used to process Gallium Nitride and diamond Configured for chlorinated plasmas (Cl2 and BCL3 MFC fitted) with also Ar, O2 and N2.

OEM Model Description

None Provided

Documents

No documents

STS

PRO ICP

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: 4 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145586

Wafer Sizes:

Unknown

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145586

Wafer Sizes:

Unknown

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

ICP Etcher Complete

Configuration

Was used to process Gallium Nitride and diamond Configured for chlorinated plasmas (Cl2 and BCL3 MFC fitted) with also Ar, O2 and N2.

OEM Model Description

None Provided

Documents

No documents

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Dry / Plasma EtchVintage: 0Condition: RefurbishedLast Verified:Over 60 days ago