Description
No descriptionConfiguration
SPTS fxP ICP 4PM Etcher fxP Transport Module Omega c2L ICP Module (AIN & GaN) Omega c2L ICP Module (SiNx) Omega fxP Rapier Module (Bosch) Omega c2L Synapse Module (Si, SiO2 & Mo)OEM Model Description
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.Documents
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KLA / SPTS
OMEGA fxP
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 26 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116213
Wafer Sizes:
Unknown
Vintage:
2019
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllKLA / SPTS
OMEGA fxP
CATEGORY
Dry / Plasma Etch
Last Verified: 26 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116213
Wafer Sizes:
Unknown
Vintage:
2019
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
SPTS fxP ICP 4PM Etcher fxP Transport Module Omega c2L ICP Module (AIN & GaN) Omega c2L ICP Module (SiNx) Omega fxP Rapier Module (Bosch) Omega c2L Synapse Module (Si, SiO2 & Mo)OEM Model Description
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.Documents
No documents