OMEGA fxP
Category
Dry / Plasma EtchOverview
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
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KLA / SPTS
OMEGA fxP
Dry / Plasma EtchVintage: 2019Condition: UsedLast Verified26 days agoKLA / SPTS
OMEGA fxP
Dry / Plasma EtchVintage: Condition: UsedLast Verified16 days agoKLA / SPTS
OMEGA fxP
Dry / Plasma EtchVintage: Condition: UsedLast Verified16 days agoKLA / SPTS
OMEGA fxP
Dry / Plasma EtchVintage: Condition: UsedLast Verified16 days ago
