Description
EOP, warm idle older chamber w/different accessibility regarding maintenanceConfiguration
Synapse chamber for Omega fxP Etch system w/o MF Gas table:: SF6 H2 CHF3 CF4 and C4F8 He O2OEM Model Description
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.Documents
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 11 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
146866
Wafer Sizes:
6"/150mm
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / SPTS
OMEGA fxP
CATEGORY
Dry / Plasma Etch
Last Verified: 11 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
146866
Wafer Sizes:
6"/150mm
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
EOP, warm idle older chamber w/different accessibility regarding maintenanceConfiguration
Synapse chamber for Omega fxP Etch system w/o MF Gas table:: SF6 H2 CHF3 CF4 and C4F8 He O2OEM Model Description
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.Documents
No documents