Description

No description

Configuration

ICP Etcher See attached utility one-line for gases. The tool is missing the turbo & controller, but rebuilt spares can be included with the tool. Both chambers are RIE 6” only (load-lock)

OEM Model Description

Etchers & Ashers

Documents

No documents

PLASMATHERM

SLR-770 ICP

Verified

Dry / Plasma Etch

Last Verified: 5 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

140327

Wafer Sizes:

6"/150mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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listing-photo-0a51ec9a273e4de5913b0a1fbb2c391c-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75913/0a51ec9a273e4de5913b0a1fbb2c391c/289cf18ff5ca4f6dbb9d40781360ad68_1b064cd1313e4434b8896927531e250e_mw.jpeg

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

140327

Wafer Sizes:

6"/150mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

ICP Etcher See attached utility one-line for gases. The tool is missing the turbo & controller, but rebuilt spares can be included with the tool. Both chambers are RIE 6” only (load-lock)