
Description
No descriptionConfiguration
The tool is missing the turbo & controller, but rebuilt spares can be included with tool Gases: CL2, BCL3, CF4, C2F6, Ar, O2 6” but possible to run 8” (no load-lock)OEM Model Description
Plasma etchDocuments
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
140328
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
SLR 740
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
140328
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
The tool is missing the turbo & controller, but rebuilt spares can be included with tool Gases: CL2, BCL3, CF4, C2F6, Ar, O2 6” but possible to run 8” (no load-lock)OEM Model Description
Plasma etchDocuments
No documents