
Description
Gases: 8 lines with 8 MFCs. 2 of NH3 (100 SCCM) and 6 of N2 (4 of 1 SLM and 1 of 200 SCCM and 1 of 2SLM) Plasma Therm 700 Series Wafer Batch Plasma Etcher and PECVD The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale. Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz Plasma-Therm 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. Plasma-Therm 790 RIE Parts tool Plasma-Therm 790 PECVD Plasma-Therm 790 PECVD Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD Plasma-Therm VLN (Versaline) ICP – single wafer manual load Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load YESHMDS Class 10 – all Stainless SteelConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 7 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
138624
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
700
CATEGORY
Dry / Plasma Etch
Last Verified: 7 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
138624
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Gases: 8 lines with 8 MFCs. 2 of NH3 (100 SCCM) and 6 of N2 (4 of 1 SLM and 1 of 200 SCCM and 1 of 2SLM) Plasma Therm 700 Series Wafer Batch Plasma Etcher and PECVD The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale. Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz Plasma-Therm 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. Plasma-Therm 790 RIE Parts tool Plasma-Therm 790 PECVD Plasma-Therm 790 PECVD Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD Plasma-Therm VLN (Versaline) ICP – single wafer manual load Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load YESHMDS Class 10 – all Stainless SteelConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents