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OXFORD PLASMAPRO 100 COBRA

Description

-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.

Configuration

Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)

OEM Model Description

None Provided

Documents

No documents

OXFORD

PLASMAPRO 100 COBRA

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: Yesterday

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

147928

Wafer Sizes:

Unknown

Vintage:

2021

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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PLASMAPRO 100 COBRA

verified-listing-icon

Verified

CATEGORY

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Last Verified: Yesterday

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

147928

Wafer Sizes:

Unknown

Vintage:

2021

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.

Configuration

Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)

OEM Model Description

None Provided

Documents

No documents

Similar Listings

OXFORD PLASMAPRO 100 COBRA

OXFORD

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OXFORD PLASMAPRO 100 COBRA

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