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LAM RESEARCH CORPORATION TCP 9600
    Description
    Metal layer dry etching machine
    Configuration
    No Configuration
    OEM Model Description
    TCP 9600 is a high-density, low-pressure system from Lam’s TCP product line. It was introduced in late 1992 and incorporates the Company’s patented Transformer Coupled Plasma-TM- source technology for etching 0.35 micron and smaller geometries. The TCP 9600 series is designed for metal etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode. This improves etch results across a wider process window and offers customers a reliable, lower cost of ownership solution to their advanced needs.
    Documents

    No documents

    LAM RESEARCH CORPORATION

    TCP 9600

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 30 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    112610


    Wafer Sizes:

    6"/150mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    LAM RESEARCH CORPORATION TCP 9600

    LAM RESEARCH CORPORATION

    TCP 9600

    Dry / Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 30 days ago

    LAM RESEARCH CORPORATION

    TCP 9600

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 30 days ago
    listing-photo-5f52de85c4b14613a797ca26d4282641-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/3077/5f52de85c4b14613a797ca26d4282641/f62865a079724f3497d69338782965a1_960083_mw.jpg
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    listing-photo-5f52de85c4b14613a797ca26d4282641-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/3077/5f52de85c4b14613a797ca26d4282641/7fb5ed3055a549d887b9ba87fe9ec8da_960088_mw.jpg
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    listing-photo-5f52de85c4b14613a797ca26d4282641-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/3077/5f52de85c4b14613a797ca26d4282641/46beccd4560047999c184f56313e83e1_960087_mw.jpg
    listing-photo-5f52de85c4b14613a797ca26d4282641-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/3077/5f52de85c4b14613a797ca26d4282641/b451757fb92443ef83bcf5cc3aabc021_9600815_mw.jpg
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    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    112610


    Wafer Sizes:

    6"/150mm


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Metal layer dry etching machine
    Configuration
    No Configuration
    OEM Model Description
    TCP 9600 is a high-density, low-pressure system from Lam’s TCP product line. It was introduced in late 1992 and incorporates the Company’s patented Transformer Coupled Plasma-TM- source technology for etching 0.35 micron and smaller geometries. The TCP 9600 series is designed for metal etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode. This improves etch results across a wider process window and offers customers a reliable, lower cost of ownership solution to their advanced needs.
    Documents

    No documents

    Similar Listings
    View All
    LAM RESEARCH CORPORATION TCP 9600

    LAM RESEARCH CORPORATION

    TCP 9600

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 30 days ago
    LAM RESEARCH CORPORATION TCP 9600

    LAM RESEARCH CORPORATION

    TCP 9600

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 30 days ago
    LAM RESEARCH CORPORATION TCP 9600

    LAM RESEARCH CORPORATION

    TCP 9600

    Dry / Plasma EtchVintage: 0Condition: RefurbishedLast Verified:Over 60 days ago