Description

Details Attached

Configuration

Envision software Configured for 200mm / 8” wafers Hine Cassette indexer load / unload Entrance Loadlock Main chamber - Top actuated clamping system - Configured for ? gases Remote AC Panel

OEM Model Description

The Rainbow 4520 is a state-of-the-art Silicon Dioxide Etching system that is fully automated and capable of processing wafers of various sizes, including 4-, 5-, 6-, and 8-inch wafers. This advanced system features a top powered electrode plate, programmable electrode spacing, and automatic wafer alignment and placement, ensuring precise and efficient etching. With its advanced capabilities, the Rainbow 4520 is an ideal solution for high-quality Silicon Dioxide Etching.

Documents

LAM 4520 .pdf

LAM RESEARCH CORPORATION

RAINBOW 4520

Verified

Dry / Plasma Etch

Last Verified: 2 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

139820

Wafer Sizes:

8"/200mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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