Overview

Lam’s TCP 9600DFM is a metal etch solution for sub-150nm interconnect applications. It combines high system reliability and availability with new features that deliver excellent on-wafer performance, low defectivity, and optimum control of the etch chamber environment. The system integrates metal etch with microwave strip on the Alliance® multichamber platform and offers high throughput, low cost of consumables, and industry-leading availability and manufacturability for interconnect production at 150nm and beyond.