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LAM RESEARCH CORPORATION TCP 9100PTX
  • LAM RESEARCH CORPORATION TCP 9100PTX
  • LAM RESEARCH CORPORATION TCP 9100PTX
  • LAM RESEARCH CORPORATION TCP 9100PTX
  • LAM RESEARCH CORPORATION TCP 9100PTX
Description
LAM Alliance 9100PTX Oxide H No missing parts.
Configuration
2ch:Via/CW PM1/2
OEM Model Description
Lam's TCP product line of high-density, low-pressure etch systems, which was introduced in late 1992, incorporates the Company's patented Transformer Coupled Plasma source technology for etching 0.25 micron and smaller geometries. The Company currently offers the TCP 9600SEII and TCP 9600PTX for metal etch applications, the TCP 9400SEII and TCP 9400PTX for polysilicon, polycide and shallow trench isolation etch applications and the TCP 9100 and TCP 9100PTX for oxide etch applications.
Documents
CATEGORY
Dry / Plasma Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

114047


Wafer Sizes:

8"/200mm


Vintage:

2000


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

LAM RESEARCH CORPORATION

TCP 9100PTX

verified-listing-icon
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
listing-photo-1f5ed4ac81f64f7284efa3c886420170-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2094/1f5ed4ac81f64f7284efa3c886420170/f64fe6a099984bfc8da912494b69ce94_1_mw.jpg
listing-photo-1f5ed4ac81f64f7284efa3c886420170-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2094/1f5ed4ac81f64f7284efa3c886420170/f16da7a5f47d4b358f019d3b70c0d75f_2_mw.jpg
listing-photo-1f5ed4ac81f64f7284efa3c886420170-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2094/1f5ed4ac81f64f7284efa3c886420170/3d8a9a4c28b6402d91db00c0feacf82f_3_mw.jpg
listing-photo-1f5ed4ac81f64f7284efa3c886420170-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2094/1f5ed4ac81f64f7284efa3c886420170/2c6852728a7a4a33a1e1a156c5d004f6_4_mw.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

114047


Wafer Sizes:

8"/200mm


Vintage:

2000


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
LAM Alliance 9100PTX Oxide H No missing parts.
Configuration
2ch:Via/CW PM1/2
OEM Model Description
Lam's TCP product line of high-density, low-pressure etch systems, which was introduced in late 1992, incorporates the Company's patented Transformer Coupled Plasma source technology for etching 0.25 micron and smaller geometries. The Company currently offers the TCP 9600SEII and TCP 9600PTX for metal etch applications, the TCP 9400SEII and TCP 9400PTX for polysilicon, polycide and shallow trench isolation etch applications and the TCP 9100 and TCP 9100PTX for oxide etch applications.
Documents