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LAM RESEARCH CORPORATION RAINBOW 4720XL

Description

No description

Configuration

Type of Loadlock: LAM Number of Process Chamber: 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot BROOKS MAG7 1409CHE11272 User Interface FRONT UI Computer YES TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm YES Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control YES Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board YES Configuration of Process Module PM1 PM2 PM4 Remark Model of Chamber 4720XL 4720XL 4720XL Year of Construction 2014 2014 2014 Process Gauge MKS MKS MKS 625D-30518 Chamber Gauge MKS MKS MKS 625D-30518 Foreline Guage MKS MKS MKS 625D11TGEEV Pendulum valve YES YES YES Model of TMP STP-H301C STP-H301C STP-H301C Model of TMP Controller SCU-800 SCU-800 SCU-800 Model of TCP Generator(TOP) AE AE AE Model of Bias Generator(BOT) 1250 1250 1250 TCP Matcher YES YES YES Bias Matcher YES YES YES ESC/ chuck YES YES YES ESC Power Supply YES YES YES Backside Helium UPC YES YES YES VME Assembly YES YES YES Foreline Assembly YES YES YES OES YES YES YES Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPS

OEM Model Description

Etchers & Ashers

Documents

No documents

LAM RESEARCH CORPORATION

RAINBOW 4720XL

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: 6 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145018

Wafer Sizes:

8"/200mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Similar Listings

LAM RESEARCH CORPORATION RAINBOW 4720XL

LAM RESEARCH CORPORATION

RAINBOW 4720XL

Dry / Plasma Etch

Vintage: 0Condition: Used

Last Verified6 days ago

LAM RESEARCH CORPORATION

RAINBOW 4720XL

verified-listing-icon

Verified

CATEGORY

Dry / Plasma Etch

Last Verified: 6 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145018

Wafer Sizes:

8"/200mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

Type of Loadlock: LAM Number of Process Chamber: 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot BROOKS MAG7 1409CHE11272 User Interface FRONT UI Computer YES TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm YES Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control YES Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board YES Configuration of Process Module PM1 PM2 PM4 Remark Model of Chamber 4720XL 4720XL 4720XL Year of Construction 2014 2014 2014 Process Gauge MKS MKS MKS 625D-30518 Chamber Gauge MKS MKS MKS 625D-30518 Foreline Guage MKS MKS MKS 625D11TGEEV Pendulum valve YES YES YES Model of TMP STP-H301C STP-H301C STP-H301C Model of TMP Controller SCU-800 SCU-800 SCU-800 Model of TCP Generator(TOP) AE AE AE Model of Bias Generator(BOT) 1250 1250 1250 TCP Matcher YES YES YES Bias Matcher YES YES YES ESC/ chuck YES YES YES ESC Power Supply YES YES YES Backside Helium UPC YES YES YES VME Assembly YES YES YES Foreline Assembly YES YES YES OES YES YES YES Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPS

OEM Model Description

Etchers & Ashers

Documents

No documents

Similar Listings

LAM RESEARCH CORPORATION RAINBOW 4720XL

LAM RESEARCH CORPORATION

RAINBOW 4720XL

Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:6 days ago