
Description
New and unused; the process chamber is still in their original packaging.Configuration
Product Description for Versys Metal - 2300 Versys Metal PM, 200 mm - Chemraz Orings - ESC Hose Kit, Standard with Shaft Seal - Chemraz Seal Door on VAT Rocker - 2200 L/s BOCE - N309079-FB PM FB INSR, FOC R, 55MI - Versys Metal Quick Clean kit - Versys Metal Pend. Valve kit - 2300 Versys Metal Jetstream Gas Box - 2300 JetStream Gas Box - 6 Gas Configuration (JetStream) - JetStream Gas Line - Heated Gas Line - 2300 PeripheralsOEM Model Description
None ProvidedDocuments
No documents
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
New
Operational Status:
Deinstalled / Crated
Product ID:
145037
Wafer Sizes:
8"/200mm
Gas Lines:
BCl3, O2, CL2, NF3, SF6, N2, CF4, Ar, He
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllLAM RESEARCH CORPORATION
2300 VERSYS METAL
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
New
Operational Status:
Deinstalled / Crated
Product ID:
145037
Wafer Sizes:
8"/200mm
Gas Lines:
BCl3, O2, CL2, NF3, SF6, N2, CF4, Ar, He
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
New and unused; the process chamber is still in their original packaging.Configuration
Product Description for Versys Metal - 2300 Versys Metal PM, 200 mm - Chemraz Orings - ESC Hose Kit, Standard with Shaft Seal - Chemraz Seal Door on VAT Rocker - 2200 L/s BOCE - N309079-FB PM FB INSR, FOC R, 55MI - Versys Metal Quick Clean kit - Versys Metal Pend. Valve kit - 2300 Versys Metal Jetstream Gas Box - 2300 JetStream Gas Box - 6 Gas Configuration (JetStream) - JetStream Gas Line - Heated Gas Line - 2300 PeripheralsOEM Model Description
None ProvidedDocuments
No documents