Description
Poly EtcherConfiguration
RF system, pressure control system and temperature control system, including the RF generator, Phase/Magnitude Sensor, Cap Motor driver, turbo pump (TMP), Pendulum (Throttle) valve, Hoist, Electrostatic Chuck (ESC), heater, and coolant path. SYSTEM INTERCONNECT: 224-800096-830 SUPPLY CIRCUIT VOLTAGE RATING: 208VAC +10%, -10% FREQUENCY: 50/60 Hz SUPPLY CIRCUIT RATING: 3 Ph, 3 WIRE + PROTECTIVE GND PM FULL-LOAD CURRENT: 25.8 AMP RF FULL-LOAD CURRENT: 68.00 AMP RATING OF LARGEST LOAD: 38 AMP MAIN CB CURRENT RATING: 80 AMP RF CB RATING: 80 AMP RF generator type: AE Navigator IIOEM Model Description
REACTIVE ION ETCH (RIE) Conductor etch helps shape the electrically “active” materials of a semiconductor device. Even a slight variation in these miniature structures can degrade device performance. In fact, these structures are so tiny and sensitive that etch processes push the boundaries of the basic laws of physics and chemistry. Lam’s Kiyo® product family delivers the high-performance capabilities needed to precisely and consistently form these features precisely and with high productivity. For some applications, select models are also available through our Reliant® Systems as refurbished products, providing lower cost of ownership with the same quality assurance and performance as new systems.Documents
No documents
CATEGORY
Dry / Plasma Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
148401
Wafer Sizes:
12"/300mm
Vintage:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
2300 KIYO GX
CATEGORY
Dry / Plasma Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
148401
Wafer Sizes:
12"/300mm
Vintage:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Poly EtcherConfiguration
RF system, pressure control system and temperature control system, including the RF generator, Phase/Magnitude Sensor, Cap Motor driver, turbo pump (TMP), Pendulum (Throttle) valve, Hoist, Electrostatic Chuck (ESC), heater, and coolant path. SYSTEM INTERCONNECT: 224-800096-830 SUPPLY CIRCUIT VOLTAGE RATING: 208VAC +10%, -10% FREQUENCY: 50/60 Hz SUPPLY CIRCUIT RATING: 3 Ph, 3 WIRE + PROTECTIVE GND PM FULL-LOAD CURRENT: 25.8 AMP RF FULL-LOAD CURRENT: 68.00 AMP RATING OF LARGEST LOAD: 38 AMP MAIN CB CURRENT RATING: 80 AMP RF CB RATING: 80 AMP RF generator type: AE Navigator IIOEM Model Description
REACTIVE ION ETCH (RIE) Conductor etch helps shape the electrically “active” materials of a semiconductor device. Even a slight variation in these miniature structures can degrade device performance. In fact, these structures are so tiny and sensitive that etch processes push the boundaries of the basic laws of physics and chemistry. Lam’s Kiyo® product family delivers the high-performance capabilities needed to precisely and consistently form these features precisely and with high productivity. For some applications, select models are also available through our Reliant® Systems as refurbished products, providing lower cost of ownership with the same quality assurance and performance as new systems.Documents
No documents