Description
New and unused; the process modul is still in their original packaging.Configuration
Product Description for Exelan Flex 45 - 2300 Exelan Flex 45 CFE PM, 200 mm - Top PI Chamber Manometer Baffle - Barrier Seal Door on VAT Rocker - 1600 L/s Edwards - 2300 Exelan Flex 45 Quick Clean kit w/e - 2300 Exelan Flex 45 Pend. Valve kit - 2300 Exelan Flex 45 RF Maintenance kit - 2300 Exelan Flex 45 Service Tool kit - 2300 Exelan Flex 45 Jetstream Gas Box - 2300 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Remote Interface Box (per line) - Remote Interface Box (per PM) - 2300 PeripheralsOEM Model Description
None ProvidedDocuments
No documents
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
New
Operational Status:
Deinstalled / Crated
Product ID:
145038
Wafer Sizes:
8"/200mm
Gas Lines:
O2, C4F8, CH2F2, CF4, C4F6, CO, N2, Ar, SF6, CH3F, O2, H2, N2
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
2300 EXELAN FLEX45
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
New
Operational Status:
Deinstalled / Crated
Product ID:
145038
Wafer Sizes:
8"/200mm
Gas Lines:
O2, C4F8, CH2F2, CF4, C4F6, CO, N2, Ar, SF6, CH3F, O2, H2, N2
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
New and unused; the process modul is still in their original packaging.Configuration
Product Description for Exelan Flex 45 - 2300 Exelan Flex 45 CFE PM, 200 mm - Top PI Chamber Manometer Baffle - Barrier Seal Door on VAT Rocker - 1600 L/s Edwards - 2300 Exelan Flex 45 Quick Clean kit w/e - 2300 Exelan Flex 45 Pend. Valve kit - 2300 Exelan Flex 45 RF Maintenance kit - 2300 Exelan Flex 45 Service Tool kit - 2300 Exelan Flex 45 Jetstream Gas Box - 2300 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Remote Interface Box (per line) - Remote Interface Box (per PM) - 2300 PeripheralsOEM Model Description
None ProvidedDocuments
No documents